Solid State Science and Technology, Vol. 16, No 1 (2008) 75-84

ISSN 0128-7389

Corresponding Author: mms@pkrisc.cc.ukm.my

75

QUARTZ CRYSTAL MICROBALANCE GAS SENSOR FOR DETECTION OF

VOLATILE ORGANIC COMPOUNDS USING TITANIUM

DIOXIDE COATED WITH DYE-PORPHYRIN

Syariena Arshad1, Muhammad Mat Salleh1, and Muhammad Yahaya2

1Institute of Microengineering and Nanoelectronics (IMEN)

Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, MALAYSIA

2School of Applied Physics, Faculty of Science and Technology

Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, MALAYSIA

 

ABSTRACT

A bulk acoustic sensor system was fabricated and used to detect some volatile organic compounds namely ethanol, acetone, cyclohexane, toluene, o-xylene and 2-propanol.

The sensing sensitivity was based on the changes of the quartz crystal microbalance (QCM) frequency upon exposure towards the vapors. In order to improve the sensing sensitivity and selectivity properties, the QCM was deposited with thin films using solgel dip coating method. The thin films were titanium dioxide (TiO2), porphyrin and TiO2 coated with dye porphyrin with the variation of TiO2 and porphyrin ratio, i.e. 1:2, 1:4, 1:6 and 1:8 by volume. The porphyrin used was 5, 10, 15, 20-tetraphenyl-21H, 23H-manganese (III) chloride. It was found that all the thin films were sensitive towards all type of vapors and showed different degree of sensitivity for different type of vapors.

 

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