Solid State Science and Technology, Vol. 17, No 2 (2009) 116-122

ISSN 0128-7389

Corresponding Author:





H.A. Rafaie1, 3, S. Amizam1,3, M.H. Mamat2, Z. Khusaimi1,3, M. Z. Sahdan2,

S. Abdullah1,3 and M. Rusop2,3

1Faculty of Applied Sciences, Universiti Teknologi MARA,

40450 Shah Alam, Selangor, Malaysia

2 Solar Cell Laboratory, Faculty of Electrical Engineering, Universiti Teknologi MARA,

40450 Shah Alam, Selangor, Malaysia

3NANO-SciTech Centre, Institute of Science, Universiti Teknologi MARA

40450 Shah Alam, Selangor, Malaysia



Zinc oxide (ZnO) samples have been prepared on nanostructured porous silicon (NPSi) substrate by vapor phase Thermal-CVD method. The NPSi have been prepared by electrochemical etching method in the mixture of hydrofluoric acid and ethanol electrolyte using an optimized parameter. Then the as-prepared NPSi sample was sputtered by Au-sputter coater to form a catalyst on top of the NPSi subtrate. Vapor process by Thermal-CVD was employed at low deposition temperature ranging from 400 -600 ºC. The samples were characterized using scanning electron microscopy (SEM), X-ray diffractometer (XRD) and photoluminescence spectroscopy (PL). SEM micrograph and XRD spectra confirm the growth of ZnO structure and indicates the sample formed a wurtzite structure of ZnO while PL spectra showed that the PL intensities increases as the deposition temperature increases. An estimated bandgap energy from PL observation of the ZnO samples are in the range of 3.118- 3.133 eV.



[1]. L T Canham. (1990), Silicon quantum wire array fabricated by electrochemical

and chemical dissolution of wafers. Appl Phys Lett, 57, 1046-1048.

[2]. Zhe Chuan Feng and Raphael Tsu. Porous Silicon. World Scientific, 35.

[3]. K.A. Sekak and S. Abdullah. (2006), Photoluminescence and photoacoustic

effect of Erbium-doped porous silicon nanostructure. International Journal ofNanoscience, 5, 599-604.

[4]. V. Lehmann and U. Gosele. (1991), Porous silicon formation: a quantum wire

effect. Appl Phys Lett, 58, 856-858.

[5]. Y L Liu, Y C Liu, H Yang, W B Wang, J G Ma, J Y Zhang, Y M Lu, D Z Shen

and X W Fan. (2003), The optical properties of ZnO film grown on porous Si

templates. Journal of Physics D: Applied Physics, 36, 2705-2708.

[6]. Liu, X. Wu, H. Cao and R.P.H. Chang. (2004), Jour. Appl. Phys. 95, 15.

[7]. Y.G. Wang, S.P. Lau, X.H. Zhang, H.H Hng, H.W. Lee, S.F. Yu, and B.K. Tay.

(2003), Enhancement of near-band-edge photoluminescence from ZnO film by

face-to-face annealing. Journal of Crystal Growth. 259, 335-342.

[8]. Oleg Lupan, Guangyu Chai, Lee Chow. (2008), Novel hydrogen gas sensor

based on single ZnO nanorod. Microelectronic Engineering , Accepted


[9]. E. Comini, G. Fagila, M. Ferroni, and G. Sberveglieri. (2007), Gas sensing

properties of zinc oxide nanostructures prepared by thermal evaporation.

Applied Physics A, 88, 45-48.

[10]. Weizhong Xu, Zhizhen Ye_, Liping Zhu, Yujia Zeng, Liu Jiang, Binghui Zhao,

(2005) “ZnO nanostructure networks grown on silicon substrates”, Journal of

Crystal Growth 277, 490–495.

[11]. Ahmad Umar, S.H. Kim, J.H. Kim, A. Al-Hajry, Yoon Bong Hahn. (2008),

Temperature-dependant non-catalytic growth of ultraviolet-emitting ZnO

nanostructures on silicon substrate by thermal evaporation process. Journal of

Alloys and Compounds. 463, 516–521.

[12]. Xike Tian, Fang Pei, Jinbo Fei, Chao Yang, Hongyu Luo, Dongyue Luo,

Zhenbang Pi. (2006), Synthesis and growth mechanism: A novel comb-like ZnO

nanostructure. Physica E. 31, 213–217.

[13]. Z.W. Liu, C.K. Ong. (2007), Synthesis and size control of ZnO nanorods by

conventional pulsed-laser deposition without catalyst. Materials Letter. 61,


[14]. Maryam Movahedi, Elaheh Kowsari, Ali R. Mahjoub, Issa Yavari. (2008), A

task specific basic ionic liquid for synthesis of flower-like ZnO by hydrothermal

method. Materials Letters. 62, 3856–3858.

[15]. Zhong Lin Wang. (2004), Zinc oxide nanostructure: growth, properties and

applications. Journal of Physics: Condensed Matter, 16, R829-R858.

[16]. Zhong Lin Wang. Nanostructures of Zinc Oxide. Material today: Review

Feature, June 2004.

[17]. Xiang Liu, Alexey Yamilov, Xiahua Wu, Jian-Guo Zheng, Hui Cao and R.P.H.

Chang. (2004), Effect of ZnO Nanostructure on 2-Dimensional Random Lasing

Properties. Chem. Mater., 16, 5414-5419.

[18]. Xiaoqiang An, Chuanbao Cao, Hesun Zhu. (2007), Bio-inspired fabrication of

ZnO nanorod arrays and their optical and photoresponse properties. Journal of

Crystal Growth. 308, 340-347

[19]. M.H. Huang, S. Mao, H. Feick, H.Q. Yan, Y.Y. Wu, H. Kind, E. Weber, R.

Russo, P.D. Yang, (2001) Science. 292, 1897.