Solid State Science and Technology, Vol. 18, No 2 (2010) 52-60

 ISSN 0128-7389

 

THE EFFECT OF TIO2 THIN FILMS ON THE SENSITIVITY, REPEATABILITY AND CURRENT DENSITY OF THE DIELECTRIC BOLOMETER BA0.6SR0.4TIO3 AS A DISTANCE SENSOR

 

Efil Yusrianto, Noor Baa’yah Ibrahim, Zahari Ibarahim

School of Applied Physics, Faculty of Science and Technology,

Universiti Kebangsaan Malaysia, 43600, Bangi, Selangor

 

ABSTRACT

Sol–gel method has been used for the preparation of titanium as a buffer layer in the dielectric bolometer Ba0.6Sr0.4TiO3. The TiO2 films were prepared onto RuO2/SiO2/Si substrate and annealed at various temperatures. The X-ray diffraction (XRD) results showed that TiO2 thin film annealed at 300 and 350oC were amorphous, and transformed into the anatase form at 400 oC, and mix phase between anatase and the brookite phase at 450oC. The field emission scanning electron microscope (FE-SEM) results showed that the grain size of TiO2 thin films increased as the temperature increased. All the sensitivity, repeatability and current density of the sensors decreased with the increased grain size of TiO2 thin films after annealed above 350oC. Our result shows that all of the sensors except sensor with TiO2 film annealed at 550oC can act as a sensor even though without the IR source.

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