Solid State Science and Technology, Vol. 18, No 2 (2010) 52-60

 ISSN 0128-7389




Efil Yusrianto, Noor Baa’yah Ibrahim, Zahari Ibarahim

School of Applied Physics, Faculty of Science and Technology,

Universiti Kebangsaan Malaysia, 43600, Bangi, Selangor



Sol–gel method has been used for the preparation of titanium as a buffer layer in the dielectric bolometer Ba0.6Sr0.4TiO3. The TiO2 films were prepared onto RuO2/SiO2/Si substrate and annealed at various temperatures. The X-ray diffraction (XRD) results showed that TiO2 thin film annealed at 300 and 350oC were amorphous, and transformed into the anatase form at 400 oC, and mix phase between anatase and the brookite phase at 450oC. The field emission scanning electron microscope (FE-SEM) results showed that the grain size of TiO2 thin films increased as the temperature increased. All the sensitivity, repeatability and current density of the sensors decreased with the increased grain size of TiO2 thin films after annealed above 350oC. Our result shows that all of the sensors except sensor with TiO2 film annealed at 550oC can act as a sensor even though without the IR source.


[1]. Zhu H., Noda M., Mukaigawa T., Xu H., Hashimoto K. and Okuyama M.,"Application of ferroelectric BST thin film prepared by MOD for uncooled infrared sensor of dielectric bolometer mode," (2000) Transactions of the Institute of Electrical Engineers of Japan, 120-E, 12, 554-558,.

[2]. Hashimoto K, Xu H, Mukaigawa T., Kubo Ryuichi, Zhu H., Noda M. and OkuyamaM., "Si monolithic microbolometers of ferroelectric BST thin film combined with readout FET for uncooled infrared image sensor, (2001)" Sensors and Actuators A, 88, 10-19.

[3]. Benet G., Blanes F., Simo J. E. and Perez P., "Using infrared sensors for distance measurement in mobile robots, (2002) " Robotics and Autonomous Systems, 40, 255-266.

[4]. P. Wauthoz, M. Ruwet, y. Machej, P. Grange, (1999) Appl. Catal. 69 149.

[5]. K. Katoh, A. Tsuzuki, H. Taoda, Y. Torii, T. Kato, Y. Butsugan, J. (1994) Mater. Sci. 29 5911.

[6]. T. Hisanaga, K. Harada, K. Tanaka, J. (1990) Photo-chem. Photobiol. A53 113.

[7]. B.O. Regan, M. Gratzel, (1991) Nature 353 737.

[8]. L. D. Birkefeld, A. M. Azad, S. A. Akbar, J. Am. Ceram. (1992) Soc. Jpg. 79 2964.

[9]. K. Nagase, Y.Shimizu,N.Miura,N.Yamazoe, J.Ceram.(1993) Soc.Jpg.101 1032.

[10]. E. A. Barringer, H. K. Bower, J. (1982) Ceram. Soc. Jpg. 65 199.

[11]. Dewi. R. Ph.D Thesis. Nasional Univiversity of Malaysia, Bangi. (2009) Distance sensor based on nanoparticles of barium strontium titanate.

[12]. Hanani.N.Master Thesis.Nasional Univiversity of Malaysia,Bangi (2005).The development of barium strontium titanate ceramics bolometer as distance sensor.

[13]. H.Z. Zhang, J.F. Banfield, (2000) J. Phys. Chem., B 104 3481–3487

[14]. R. Revel, C. Perego, I. Clemencon, B. Rebours, O. Durupthy, S. Cassaigon, J. P. Jolivet, (2008) “Thermal Stability of Brookite -TiO2 Nanoparticles with Controlled Size and Shape: in-situ studies by XRD” Proceedings Library Symposium NN.

[15]. Y.L. Wang, K.Y. Zhang, (2001) Surf. Coat. Technol. 140 155.

[16]. S. Takeda, S. Suzuki, H. Odaka, H. Hosono, (2001) Thin Solid Films 392 338.

[17]. H.Y. Ha, S.W.Nam, T.H.Lim, I.H.Oh, S.A.Hong, J. (1996) Membr. Sci. 111 81.

[18]. L. Hu, T. Yoko, H. Kozuka, S. Sakka, Thin Solid Films 219 (1992) 18.

[19]. C. J. Brinker, G.W.Scherer, Academic Press, San Diego (1990) Sol-Gel Science.

[20]. C.J.Brinker,G. L. Frye, A. J Hurd, C.S. Ashlet, (1991)Thin Solid Films 201 97.

[21]. Yu, X. Zhao, Q. Zhao., (2001) J. Mater Chem and Phys. 69 25 – 29.

[22]. D.J.Kim, S. H. Hahn, S. H. Oh, E. J. Kim, (2002) Mater.Letters 57 355 – 360.J.