Solid State Science and Technology, Vol. 18, No 2 (2010) 99-104
EFFECT OF SUBSTRATE BIAS ON THE OPTICAL, BONDING AND ELECTRICAL PROPERTIES OF a-CNx DEPOSITED BY rf PECVD
M. Othman, R. Ritikos , S. M .A. Gani, S. A. Rahman and M. R. Muhamad
The Solid Sate Physics Laboratory, Physics Department,
University of Malaya, 50603, Kuala Lumpur.
Hydrogenated amorphous carbon nitride (a-CNx:H) thin films were deposited using rf PECVD technique. The effects of negative dc substrate biasing on formation of these films were studied. UV-Vis-NIR spectroscopy was used to obtain the deposition rate (D) and optical energy gap (E04). Bonding properties were studied by means of FTIR spectroscopy while the I-V characteristics were measured by using two probes I-V. The results show a significant change in deposition at a substrate bias of -120 V with an increase in the deposition rate and E04. Effects of the substrate biasing on the optical, bonding and electrical properties are discussed.
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